Microactuators Systems of Torsion Silicon Cantilever

Magnetic microactuation systems of torsion silicon cantilever is described. Devices are constructed in a batch fabrication process which combines electroplating with conventional photolithography , materials, and equipment. The magnetic transducers are applied to generation of motion in micromechanical structures such as cantilever, beam, membrane. Microelectromechanical systems (MEMS) with magnetic transducers are fabricated in order to combine the conventional silicon based micromachining techniques with the techniques of the magnetic thin film (nickel-iron). The mechanical and magnetic analysis of the silicon cantilever in the magnetic field was also described. Theoretical expressions for the displacement and torque are developed and compared to experimental results. Key-Words: magnetic microactuators, cantilever, silicon structures, magnetic transducers, sensors